A 50nm spatial resolution EUV imaging–resolution dependence on object thickness and illumination bandwidth

Saved in:
Bibliographic Details
Published in:Optics express 2011-05, Vol.19 (10), p.9541
Main Authors: Wachulak, Przemyslaw W., Bartnik, Andrzej, Fiedorowicz, Henryk, Kostecki, Jerzy
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.19.009541