Laser-induced patterning for a diffraction grating using the phase change material of Ge 2 Sb 2 Te 5 (GST) as a spatial light modulator in X-ray optics: a proof of concept

The proposed X-ray spatial light modulator (SLM) concept is based on the difference of X-ray scattering from amorphous and crystalline regions of phase change materials (PCMs) such as Ge 2 Sb 2 Te 5 (GST). In our X-ray SLM design, the “ on” and “ off” states correspond to a patterned and homogeneous...

Full description

Saved in:
Bibliographic Details
Published in:Optical materials express 2022-04, Vol.12 (4), p.1408
Main Authors: Park, Jeongwon, Zalden, Peter, Ng, Edwin, Johnston, Scott, Fong, Scott W., Chang, Chieh, Tassone, Christopher J., Van Campen, Douglas, Mok, Walter, Mabuchi, Hideo, Wong, H.-S. Philip, Shen, Zhi-Xun, Lindenberg, Aaron M., Sakdinawat, Anne
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The proposed X-ray spatial light modulator (SLM) concept is based on the difference of X-ray scattering from amorphous and crystalline regions of phase change materials (PCMs) such as Ge 2 Sb 2 Te 5 (GST). In our X-ray SLM design, the “ on” and “ off” states correspond to a patterned and homogeneous state of a GST thin film, respectively. The patterned state is obtained by exposing the homogeneous film to laser pulses. In this paper, we present patterning results in GST thin films characterized by microwave impedance microscopy and X-ray small-angle scattering at the Stanford Synchrotron Radiation Lightsource.
ISSN:2159-3930
2159-3930
DOI:10.1364/OME.451534