Phase modulation using a titanium dioxide strip on lithium niobate

In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next...

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Published in:Optical materials express 2022-08, Vol.12 (8), p.3296
Main Authors: Zhu, Xiaofeng, Nelan, Sean, Mercante, Andrew J., Shopp, Benjamin, Yao, Peng, Shi, Shouyuan, Prather, Dennis W.
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cited_by cdi_FETCH-LOGICAL-c267t-602fdbdef2bbab084cb3f0ca48ddb7236bbf58f29cf0b2325c24490d6f4ffd563
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description In this manuscript, we demonstrate the first phase modulator using titanium dioxide as a strip loaded waveguide on thin-film lithium niobate. The amorphous titanium dioxide was fabricated using RF reactive sputtering followed by a dielectric lift-off process. Two gold electrodes were deposited next to the waveguide by using the same process. This process eliminates the need for plasma etching or high-temperature vapor deposition methods, opening the door to fabrication on sensitive material systems. A propagation loss of 0.156 dB/mm and V π of 3.2 V at 1550 nm were experimentally measured and reported.
doi_str_mv 10.1364/OME.465698
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