Hot-wire chemical vapor deposition low-loss hydrogenated amorphous silicon waveguides for silicon photonic devices

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Bibliographic Details
Published in:Photonics research (Washington, DC) DC), 2019-02, Vol.7 (2), p.193
Main Authors: Oo, Swe Z., Tarazona, Antulio, Khokhar, Ali Z., Petra, Rafidah, Franz, Yohann, Mashanovich, Goran Z., Reed, Graham T., Peacock, Anna C., Chong, Harold M. H.
Format: Article
Language:English
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ISSN:2327-9125
2327-9125
DOI:10.1364/PRJ.7.000193