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Electrical Properties of Thin Iron Films Grown on Clean Si(100) and on Si(100)-c(4×12)-Al Surface Phase
Electrical properties of thin iron films deposited at room temperature both on clean Si(100) and prefabricated surface phase Si(100)-c(4×12)-Al were studied by means of in situ Hall effect registration and conductance measurements. It was shown that Si(100)-c(4×12)-Al surface phase blocks intermixin...
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Published in: | E-journal of surface science and nanotechnology 2009/03/14, Vol.7, pp.167-172 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites |
Online Access: | Get full text |
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Summary: | Electrical properties of thin iron films deposited at room temperature both on clean Si(100) and prefabricated surface phase Si(100)-c(4×12)-Al were studied by means of in situ Hall effect registration and conductance measurements. It was shown that Si(100)-c(4×12)-Al surface phase blocks intermixing of iron and substrate atoms. Conductance and mobility of the majority carriers in this surface phase is higher than that in Si(100)2×1 within the temperature range from room temperature to 180°C. Deposition of less than 25 monolayers of iron on the clean Si(100) resulted in significant reduction of conductance. Continuous iron film on Si(100)-c(4×12)-Al forms at coverage approximately twice thinner compared to deposition on Si(100)2×1. [DOI: 10.1380/ejssnt.2009.167] |
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ISSN: | 1348-0391 1348-0391 |
DOI: | 10.1380/ejssnt.2009.167 |