Low Energy Ar+ Ion Scattering on InGaP(001) Surface

The energy and angular distributions of particles scattered Ar+ ions on the surface of InGaP(001) have been calculated. The correlation between experimental and calculated angular distributions of the scattered particles has been presented. It has been shown that the semichanneled ions formed the ch...

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Bibliographic Details
Published in:E-journal of surface science and nanotechnology 2020/04/23, Vol.18, pp.164-167
Main Authors: Karimberganovich, Karimov Mukhtorjon, Otoboyevich, Kutliev Uchkun, Ko'ziyevich, Ismailov Shavkat, o'g'li, Otabaev Mekhroj Uchkun
Format: Article
Language:English
Subjects:
Computer simulation
Energy and angular distributions
Ion scattering
Semichannel
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Summary:The energy and angular distributions of particles scattered Ar+ ions on the surface of InGaP(001) have been calculated. The correlation between experimental and calculated angular distributions of the scattered particles has been presented. It has been shown that the semichanneled ions formed the characteristic peaks in the energy distributions of the scattered particles.
ISSN:1348-0391
1348-0391
DOI:10.1380/ejssnt.2020.164