AZO (ZnO:Al) Transparent Conductive Film Prepared by Plasma Enhanced Chemical Vapour Deposition and its Performances in Comparison with ZnO Film

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Bibliographic Details
Published in:Asian journal of chemistry 2014, Vol.26 (6), p.1625-1627
Main Authors: Chen, Zhaoquan, Zhu, Longji, Hong, Lingli, Xue, Changguo, Liu, Minghai, Zheng, Xiaoliang, Hu, Yelin, Ye, Qiubo, Hu, Xiwei
Format: Article
Language:English
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ISSN:0970-7077
0975-427X
DOI:10.14233/ajchem.2014.17305