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Electro-Optical Property of Plasma Enhanced Chemical Vapor Deposition ZnO:Al Films Influenced by Substrate Materials and Annealing Treatments
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Published in: | Asian journal of chemistry 2014, Vol.26 (6), p.1641-1644 |
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Main Authors: | , , , , , , , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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ISSN: | 0970-7077 0975-427X |
DOI: | 10.14233/ajchem.2014.17310 |