Polishing substrates of single crystal silicon carbide and sapphire for optoelectronics

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Bibliographic Details
Published in:Functional materials 2016-01, Vol.23 (1), p.104-110
Main Author: Filatov, O.Yu
Format: Article
Language:English
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ISSN:1027-5495
2218-2993
DOI:10.15407/fm23.01.104