The features of temperature dependence of contact resistivity of Au-Ti-Pd2Si-p+-Si ohmic contacts

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Bibliographic Details
Published in:Semiconductor physics, quantum electronics, and optoelectronics quantum electronics, and optoelectronics, 2009-12, Vol.13 (1), p.8-11
Main Author: Belyaev, A.E.
Format: Article
Language:English
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ISSN:1560-8034
1605-6582
DOI:10.15407/spqeo13.01.008