50.2: OLED Mass Production Deposition Equipment Using Downward Organic and Metal Deposition Method

Until now, conventional vacuum thermal deposition system of which evaporation source is point source has many critical troubles like unstable deposition rate control, the defective design and material of crucible, organic material decomposition and discoloration, very low material utilization usage,...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2004-05, Vol.35 (1), p.1380-1383
Main Authors: Choi, D. K., Lee, J. H., Kang, C. G., Kim, C. W., Kim, D. S., Bae, K. B.
Format: Article
Language:English
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Summary:Until now, conventional vacuum thermal deposition system of which evaporation source is point source has many critical troubles like unstable deposition rate control, the defective design and material of crucible, organic material decomposition and discoloration, very low material utilization usage, and difficulty to large size glass processing due to glass/mask sagging. So, ANS has developed downward OLED deposition equipment (DSP, Digital Scanning Process) to overcome the troubles mentioned above. The process result of our equipment will be discussed below.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.1821352