46.3: Ultra-flat ITO Films for Light Emitting Polymer Applications

The influence of process power, process pressure, discharge voltage and film thickness on electrical and morphological properties of low resistivity ITO films is presented. SEM images and AFM measurements show that flat ITO films for light emitting polymer applications with a RMS roughness of less t...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2000-05, Vol.31 (1), p.1084-1087
Main Authors: Klöppel, A., Trube, J., Hoffmann, U., Burroughes, J. H., Heeks, S. K., Gunner, A., Ramshaw, T.
Format: Article
Language:English
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Summary:The influence of process power, process pressure, discharge voltage and film thickness on electrical and morphological properties of low resistivity ITO films is presented. SEM images and AFM measurements show that flat ITO films for light emitting polymer applications with a RMS roughness of less than 1 nm can be prepared. The flat surface structure also improves the optical transmittance of ITO films being beneficial for light emitting polymer applications. The performance of light emitting polymer display devices using ultra‐flat ITO films is correlated to the ITO process variation.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.1832853