P-206L: Late-News Poster: Colour Filter ITO Deposited with Rotary Sintered Ceramic ITO Targets

Recently, sintered ceramic rotary ITO targets have received strong interest from the display industry. The considerably higher target utilization (TU, up to 90 %), i.e. more than a factor two better compared to planar counterparts, is the main point of attraction. Such higher target utilization give...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2011-06, Vol.42 (1), p.1408-1411
Main Authors: Lippens, Paul, Haldemann, Mark
Format: Article
Language:English
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Summary:Recently, sintered ceramic rotary ITO targets have received strong interest from the display industry. The considerably higher target utilization (TU, up to 90 %), i.e. more than a factor two better compared to planar counterparts, is the main point of attraction. Such higher target utilization gives indeed rise to much lower coating costs. However, the advantages go far beyond that: not only do rotary sintered ceramic ITO targets sputter quasi nodule free, which results in higher process stability and a better product yield, but such targets allow for higher power loads. It will be shown that higher power loads — compared to values closer in line with planar magnetrons ‐ don't negatively impact ITO thin film properties. The work will also point to total coating cost differences between the new technology and the state‐of‐the‐art.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.3621111