38.2: Invited Paper: Fabrication of Thin Film Transistor Circuits Using Shadow Masking: A Low Cost Alternative to Conventional Lithography

Thin film transistors with micron size features are fabricated by evaporation printing (a combination of evaporation deposition through a fine metal shadow mask). Using successive deposition steps and better than lum mask to mask registry, transistor circuits are realized without conventional lithog...

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Bibliographic Details
Published in:SID International Symposium Digest of technical papers 2011-06, Vol.42 (1), p.520-522
Main Authors: Ambrose, Thomas, Cowen, Tim, Conrad, Jeff, Little, Whit, Brody, T. Peter
Format: Article
Language:English
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Summary:Thin film transistors with micron size features are fabricated by evaporation printing (a combination of evaporation deposition through a fine metal shadow mask). Using successive deposition steps and better than lum mask to mask registry, transistor circuits are realized without conventional lithography. These components are useful in active matrix backplanes for top emitting OLED and e‐paper displays.
ISSN:0097-966X
2168-0159
DOI:10.1889/1.3621374