A Raman spectroscopy study on differently deposited DLC layers in pulse arc system

This study is focused on Raman spectroscopy investigations of differently deposited diamond-like carbon (DLC) layers due to varying: (i) Ar and/or N 2 flow rate, (ii) number of impulses, and (iii) bias voltage during the growth process. Samples were prepared by a physical vapor deposition method in...

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Bibliographic Details
Published in:Chemical papers 2010-02, Vol.64 (1), p.46-50
Main Authors: Ižák, Tibor, Marton, Marián, Vojs, Marián, Redhammer, Robert, Varga, Marián, Veselý, Marián
Format: Article
Language:English
Subjects:
Biochemistry
Biotechnology
carbon nitride
Chemistry
Chemistry and Materials Science
Chemistry/Food Science
diamond-like carbon thin films
Industrial Chemistry/Chemical Engineering
Materials Science
Medicinal Chemistry
Original Paper
pulse arc deposition
Raman spectroscopy
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Summary:This study is focused on Raman spectroscopy investigations of differently deposited diamond-like carbon (DLC) layers due to varying: (i) Ar and/or N 2 flow rate, (ii) number of impulses, and (iii) bias voltage during the growth process. Samples were prepared by a physical vapor deposition method in a pulse arc system. It is shown that Ar and N 2 flow rates as well as the bias voltage influence the morphology and chemical composition of the deposited DLC layers. By changing the number of impulses, the number of carbon atoms sputtered from target in the vacuum chamber changes, which is reflected in the thickness and morphology of the DLC layers. Visible light Raman spectroscopy of 632 nm excitation wavelength was used for deep analysis of the deposited layers.
ISSN:0366-6352
1336-9075
1336-9075
DOI:10.2478/s11696-009-0092-9