Material Issues in Real Device Application of Multi-function Hard Mask Process

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Bibliographic Details
Published in:Journal of photopolymer science and technology 2006, Vol.19 (3), p.323-326
Main Authors: Lee, Kilyoung, Lee, Gensu, Kim, Samyoung, Lee, Sungkwon, Cho, Junhee, Kim, Wonkyu, Bok, Choelkyu, Moon, Seungchan, Kim, Jinwoong
Format: Article
Language:English
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ISSN:0914-9244
1349-6336
DOI:10.2494/photopolymer.19.323