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Control of Surface Roughness of Si and Ge Single Crystal by Laser Radiation
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| Published in: | Journal of laser micro nanoengineering 2006-12, Vol.1 (3), p.172-175 |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Citations: | Items that cite this one |
| Online Access: | Get full text |
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| ISSN: | 1880-0688 1880-0688 |
| DOI: | 10.2961/jlmn.2006.03.0004 |