Surface state evaluation of the titanium oxide thin film by atomic force microscope

Influence of ultraviolet ray on photo inductive effects of Anatase-type titanium dioxide film was investigated. The films were prepared by using cylinder magnetron gas flow sputterihg (CM-GPS) source in which pure titanium pipe target was used. In order to determine the structure of prepared film an...

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Bibliographic Details
Published in:Journal of Advanced Science 2005, Vol.17(3+4), pp.194-198
Main Authors: KOBAYASHI, Tomomi, IWASE, Mitsuo, NISHI, Yoshitake, OGURI, Kazuya
Format: Article
Language:eng ; jpn
Subjects:
anatase
photo inductive effect
TiOx
ultraviolet ray
wetting
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Summary:Influence of ultraviolet ray on photo inductive effects of Anatase-type titanium dioxide film was investigated. The films were prepared by using cylinder magnetron gas flow sputterihg (CM-GPS) source in which pure titanium pipe target was used. In order to determine the structure of prepared film an optical energy gap measurement and X-ray diffraction were carried out, indicating that the structure of prepared film was TiO2 (anatase type). The increased wettability of TiO2 film under the irradiation of the ultraviolet ray is explained from the idea based on the Howkes theory, and adhesion force was evaluated with an atomic force microscope. As a result, it has been understood that the change in the thickness of the surface adsorption layer influences as a mechanism of the optical generation hydrophile of TiO2.
ISSN:0915-5651
1881-3917
DOI:10.2978/jsas.17.194