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Rreparation of RFe2 Thin Films

In the three different FE (Flash Evaporation), IP (Ion-Plating) and IBS (Ion-Beam Sputtering), the IBS process exhibited the most clean RFe2 film with an amorphous like structure. In the FE process, the preparation process of the RFe2 powder should also taken into account because the composition of...

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Published in:Journal of Advanced Science 1993/03/15, Vol.5(1), pp.c11-c12
Main Authors: Funakura, Hiroyuki, Wada, Mitsuhiro, Uchida, Hirohisa, Uchida, Haruhisa, Matsumura, Yoshihito, Koeninger, Veit, Koike, Utsuru, Kamada, Koji, Kurino, Tsunehisa, Kaneko, Hideo
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container_title Journal of Advanced Science
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creator Funakura, Hiroyuki
Wada, Mitsuhiro
Uchida, Hirohisa
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Kurino, Tsunehisa
Kaneko, Hideo
description In the three different FE (Flash Evaporation), IP (Ion-Plating) and IBS (Ion-Beam Sputtering), the IBS process exhibited the most clean RFe2 film with an amorphous like structure. In the FE process, the preparation process of the RFe2 powder should also taken into account because the composition of the alloy film depends on the purity of the powder. The IP process has a much higher deposition rate than the FE or IBS process, however, exhibits defficulty in the contral of the compositional changes. Further investigation using these processes are progress.
doi_str_mv 10.2978/jsas.5.c11
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subjects flash evaporation
giantmagmetostriction
ion-plating
RFe2
title Rreparation of RFe2 Thin Films
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