An experimental study of the plasma parameters of a hybrid low-pressure RF discharge

This paper presents an experimental study of the plasma parameters of a hybrid radio-frequency (RF) discharge, which is a new modification of an RF discharge. The discharge is maintained by both vortex and potential RF electrical fields. To generate a hybrid RF discharge, an RF power input unit is u...

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Bibliographic Details
Published in:Moscow University physics bulletin 2012-02, Vol.67 (1), p.97-101
Main Authors: Vavilin, K. V., Gomorev, M. A., Kralkina, E. A., Nekludova, P. A., Pavlov, V. B., Zhao, Chen
Format: Article
Language:English
Subjects:
Mathematical and Computational Physics
Physics
Physics and Astronomy
Theoretical
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Summary:This paper presents an experimental study of the plasma parameters of a hybrid radio-frequency (RF) discharge, which is a new modification of an RF discharge. The discharge is maintained by both vortex and potential RF electrical fields. To generate a hybrid RF discharge, an RF power input unit is used in the form of a parallel-connected inductor and capacitor coatings. A blocking capacitor is included in the capacitive channel of the discharge. The paper presents data from the study of the influence of power coupled to the plasma, argon pressure, and blocking capacitance on the plasma parameters, i.e., the electron energy distribution, temperature, and density and plasma potential. The role of the capacitive channel in the variations in properties and the characteristics of the discharge are considered.
ISSN:0027-1349
1934-8460
DOI:10.3103/S0027134912010249