AFM investigation of nanoparticles formed on silicon surface by femtosecond laser pulses

It is shown by atomic force microscopy that nanoparticles formed upon ablation of surface of single-crystal and porous silicon by femtosecond laser pulses have a lateral size from several tens to 200 nm and a height from 2 to 30 nm. Dependences of the nanoparticle sizes and surface concentrations on...

Full description

Saved in:
Bibliographic Details
Published in:Bulletin of the Russian Academy of Sciences. Physics 2009, Vol.73 (1), p.39-41
Main Authors: Golovan, L. A., Djun, I. O., Dokukina, A. E., Zabotnov, S. V., Ezhov, A. A., Kashkarov, P. K., Maslova, N. E., Ostapenko, I. O., Panov, V. I., Timoshenko, V. U.
Format: Article
Language:English
Subjects:
Hadrons
Heavy Ions
International Symposium “Nanophysics and Nanoelectronics-2008”
Nuclear Physics
Physics
Physics and Astronomy
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:It is shown by atomic force microscopy that nanoparticles formed upon ablation of surface of single-crystal and porous silicon by femtosecond laser pulses have a lateral size from several tens to 200 nm and a height from 2 to 30 nm. Dependences of the nanoparticle sizes and surface concentrations on the residual pressure, which demonstrate the gas atmosphere influence on the nanoparticle formation, are obtained.
ISSN:1062-8738
1934-9432
DOI:10.3103/S1062873809010122