Three-layer antireflection diamond-like carbon films on glass

The three-layer diamond-like carbon films grown on the glass from the decomposition of toluene and nitrogen by Plasma Enhanced Chemical Vapor Deposition technique. The optimal parameters of three-layered structures with the minimum reflection in the range of 400–750 nm were theoretically calculated...

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Bibliographic Details
Published in:Journal of contemporary physics 2015, Vol.50 (1), p.72-78
Main Authors: Panosyan, Zh. R., Khachatrian, A. Zh, Hayrapetyan, D. B., Voskanyan, S. S., Yengibaryan, Y. V.
Format: Article
Language:English
Subjects:
Particle and Nuclear Physics
Physics
Physics and Astronomy
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Summary:The three-layer diamond-like carbon films grown on the glass from the decomposition of toluene and nitrogen by Plasma Enhanced Chemical Vapor Deposition technique. The optimal parameters of three-layered structures with the minimum reflection in the range of 400–750 nm were theoretically calculated using the generalized transfer-matrix technique. The dependence of the refractive index of grown films on the plasma power and nitrogen concentration in the gas mixture was investigated.
ISSN:1068-3372
1934-9378
DOI:10.3103/S1068337215010119