Alignment of the writing beam with the diffractive structure rotation axis in synthesis of diffractive optical elements in a polar coordinate system

A method is developed to ensure precise alignment of the origin of a polar coordinate system in which the laser beam position is defined in writing diffractive optical elements with the optical workpiece rotation axis. This method is used to improve the accuracy of a circular laser writing system in...

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Bibliographic Details
Published in:Optoelectronics, instrumentation, and data processing instrumentation, and data processing, 2017-03, Vol.53 (2), p.123-130
Main Authors: Shimanskii, R. V., Poleshchuk, A. G., Korolkov, V. P., Cherkashin, V. V.
Format: Article
Language:English
Subjects:
Lasers
Optical Devices
Optical Information Technologies
Optics
Photonics
Physics
Physics and Astronomy
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Summary:A method is developed to ensure precise alignment of the origin of a polar coordinate system in which the laser beam position is defined in writing diffractive optical elements with the optical workpiece rotation axis. This method is used to improve the accuracy of a circular laser writing system in writing large-scale diffractive optical elements in a polar coordinate system. Results of studying new algorithms of detection and correction of positioning errors of the circular laser writing system in the course of writing are reported.
ISSN:8756-6990
1934-7944
DOI:10.3103/S8756699017020030