Measuring the Quality Factor in MEMS Devices

This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a...

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Bibliographic Details
Published in:Micromachines (Basel) 2015-12, Vol.6 (12), p.1935-1945
Main Authors: Ozdemir, Savas, Akhtar, Sohail, Gunal, Ozgur, Khater, Mahmoud, Saritas, Resul, Abdel-Rahman, Eihab, Yavuz, Mustafa
Format: Article
Language:English
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Summary:This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area.
ISSN:2072-666X
2072-666X
DOI:10.3390/mi6121466