Measuring the Quality Factor in MEMS Devices

This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a...

Full description

Saved in:
Bibliographic Details
Published in:Micromachines (Basel) 2015-12, Vol.6 (12), p.1935-1945
Main Authors: Ozdemir, Savas, Akhtar, Sohail, Gunal, Ozgur, Khater, Mahmoud, Saritas, Resul, Abdel-Rahman, Eihab, Yavuz, Mustafa
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3
cites cdi_FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3
container_end_page 1945
container_issue 12
container_start_page 1935
container_title Micromachines (Basel)
container_volume 6
creator Ozdemir, Savas
Akhtar, Sohail
Gunal, Ozgur
Khater, Mahmoud
Saritas, Resul
Abdel-Rahman, Eihab
Yavuz, Mustafa
description This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area.
doi_str_mv 10.3390/mi6121466
format article
fullrecord <record><control><sourceid>crossref</sourceid><recordid>TN_cdi_crossref_primary_10_3390_mi6121466</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>10_3390_mi6121466</sourcerecordid><originalsourceid>FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3</originalsourceid><addsrcrecordid>eNpNj0tLAzEUhYMoWGoX_oNsBUfznpml1FaFDiIquBtubm400ockU6H_3ooinsU53-rAx9ipFBdat-JylZxU0jh3wEZK1Kpyzr0c_uNjNinlXexT1-2-Ruy8IyjbnNavfHgj_rCFZRp2fA44bDJPa97Nukd-TZ8JqZywowjLQpPfHbPn-expelst7m_upleLCrUWQxW0jDZgCNH54AkhtpbAoaDGNiYC1BiMBB-FQuWtb4yLxoYAFBpsvNdjdvbzi3lTSqbYf-S0grzrpei_Tfs_U_0F2jBGyw</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Measuring the Quality Factor in MEMS Devices</title><source>Publicly Available Content Database</source><creator>Ozdemir, Savas ; Akhtar, Sohail ; Gunal, Ozgur ; Khater, Mahmoud ; Saritas, Resul ; Abdel-Rahman, Eihab ; Yavuz, Mustafa</creator><creatorcontrib>Ozdemir, Savas ; Akhtar, Sohail ; Gunal, Ozgur ; Khater, Mahmoud ; Saritas, Resul ; Abdel-Rahman, Eihab ; Yavuz, Mustafa</creatorcontrib><description>This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area.</description><identifier>ISSN: 2072-666X</identifier><identifier>EISSN: 2072-666X</identifier><identifier>DOI: 10.3390/mi6121466</identifier><language>eng</language><ispartof>Micromachines (Basel), 2015-12, Vol.6 (12), p.1935-1945</ispartof><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3</citedby><cites>FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3</cites><orcidid>0000-0002-3709-7593</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids></links><search><creatorcontrib>Ozdemir, Savas</creatorcontrib><creatorcontrib>Akhtar, Sohail</creatorcontrib><creatorcontrib>Gunal, Ozgur</creatorcontrib><creatorcontrib>Khater, Mahmoud</creatorcontrib><creatorcontrib>Saritas, Resul</creatorcontrib><creatorcontrib>Abdel-Rahman, Eihab</creatorcontrib><creatorcontrib>Yavuz, Mustafa</creatorcontrib><title>Measuring the Quality Factor in MEMS Devices</title><title>Micromachines (Basel)</title><description>This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area.</description><issn>2072-666X</issn><issn>2072-666X</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2015</creationdate><recordtype>article</recordtype><recordid>eNpNj0tLAzEUhYMoWGoX_oNsBUfznpml1FaFDiIquBtubm400ockU6H_3ooinsU53-rAx9ipFBdat-JylZxU0jh3wEZK1Kpyzr0c_uNjNinlXexT1-2-Ruy8IyjbnNavfHgj_rCFZRp2fA44bDJPa97Nukd-TZ8JqZywowjLQpPfHbPn-expelst7m_upleLCrUWQxW0jDZgCNH54AkhtpbAoaDGNiYC1BiMBB-FQuWtb4yLxoYAFBpsvNdjdvbzi3lTSqbYf-S0grzrpei_Tfs_U_0F2jBGyw</recordid><startdate>20151208</startdate><enddate>20151208</enddate><creator>Ozdemir, Savas</creator><creator>Akhtar, Sohail</creator><creator>Gunal, Ozgur</creator><creator>Khater, Mahmoud</creator><creator>Saritas, Resul</creator><creator>Abdel-Rahman, Eihab</creator><creator>Yavuz, Mustafa</creator><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0002-3709-7593</orcidid></search><sort><creationdate>20151208</creationdate><title>Measuring the Quality Factor in MEMS Devices</title><author>Ozdemir, Savas ; Akhtar, Sohail ; Gunal, Ozgur ; Khater, Mahmoud ; Saritas, Resul ; Abdel-Rahman, Eihab ; Yavuz, Mustafa</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2015</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Ozdemir, Savas</creatorcontrib><creatorcontrib>Akhtar, Sohail</creatorcontrib><creatorcontrib>Gunal, Ozgur</creatorcontrib><creatorcontrib>Khater, Mahmoud</creatorcontrib><creatorcontrib>Saritas, Resul</creatorcontrib><creatorcontrib>Abdel-Rahman, Eihab</creatorcontrib><creatorcontrib>Yavuz, Mustafa</creatorcontrib><collection>CrossRef</collection><jtitle>Micromachines (Basel)</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Ozdemir, Savas</au><au>Akhtar, Sohail</au><au>Gunal, Ozgur</au><au>Khater, Mahmoud</au><au>Saritas, Resul</au><au>Abdel-Rahman, Eihab</au><au>Yavuz, Mustafa</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Measuring the Quality Factor in MEMS Devices</atitle><jtitle>Micromachines (Basel)</jtitle><date>2015-12-08</date><risdate>2015</risdate><volume>6</volume><issue>12</issue><spage>1935</spage><epage>1945</epage><pages>1935-1945</pages><issn>2072-666X</issn><eissn>2072-666X</eissn><abstract>This paper demonstrates and compares different experimental techniques utilized to estimate the quality factor (Q) and natural frequency from non-contact measurements of Microelectromechanical Systems (MEMS) motions. The relative merits of those techniques are contrasted in Q factor estimation for a cantilever beam MEMS actuator, operated in three configurations: free standing, arc-shaped, and s-shaped. It is found that damping estimation techniques that seek to minimize the deviation between the response of an “assumed” linear oscillator and the measured time-history of the motions are superior to those traditional techniques, such as logarithmic decrement and half-power bandwidth. Further, it is found that Q increases three-fold as the actuator contact with the substrate evolves from a line to an area.</abstract><doi>10.3390/mi6121466</doi><tpages>11</tpages><orcidid>https://orcid.org/0000-0002-3709-7593</orcidid><oa>free_for_read</oa></addata></record>
fulltext fulltext
identifier ISSN: 2072-666X
ispartof Micromachines (Basel), 2015-12, Vol.6 (12), p.1935-1945
issn 2072-666X
2072-666X
language eng
recordid cdi_crossref_primary_10_3390_mi6121466
source Publicly Available Content Database
title Measuring the Quality Factor in MEMS Devices
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T04%3A44%3A26IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-crossref&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Measuring%20the%20Quality%20Factor%20in%20MEMS%20Devices&rft.jtitle=Micromachines%20(Basel)&rft.au=Ozdemir,%20Savas&rft.date=2015-12-08&rft.volume=6&rft.issue=12&rft.spage=1935&rft.epage=1945&rft.pages=1935-1945&rft.issn=2072-666X&rft.eissn=2072-666X&rft_id=info:doi/10.3390/mi6121466&rft_dat=%3Ccrossref%3E10_3390_mi6121466%3C/crossref%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c330t-d31f5dcddf6bdbecaf95ea6c0e8584faa7cd41abf02c2b5b846f45ddaed8c8bb3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true