Piezoelectric MEMS wideband acoustic sensor coated by organic film

In this study, we developed an acoustic sensor with a structure in which a piezoelectric cantilever array is covered with an organic film. For this, we used AlN and polyurethane as the piezoelectric material and organic film, respectively. The results suggested that the sensitivity in the low-freque...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2023-06, Vol.62 (SG), p.SG1021
Main Authors: Kuchiji, Hiroyuki, Masumoto, Naoki, Baba, Akiyoshi
Format: Article
Language:English
Subjects:
acoustic response
acoustic sensor
AlN
Broadband
organic film
piezoelectric MEMS
Piezoelectricity
Polyurethane resins
Resonance
resonance frequency
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this study, we developed an acoustic sensor with a structure in which a piezoelectric cantilever array is covered with an organic film. For this, we used AlN and polyurethane as the piezoelectric material and organic film, respectively. The results suggested that the sensitivity in the low-frequency region improved, and the resonance frequency increased. We investigated the resonance frequency based on a simulation and verified that it matched the measured value. Further, we created a broadband acoustic sensor by covering the space between the cantilevers with an organic film.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/acbb82