Low-power and high-resolution capacitance sensing using CMOS inverter-based RC oscillator by employing voltage-integration feedback

In this paper, new circuit techniques are proposed and applied for low-power, high-resolution capacitance sensing. The first is a CMOS inverter-based resistor-capacitor oscillator that consists of a resistor, a capacitor, and three inverters, allowing it to operate at low supply voltage and low powe...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2023-04, Vol.62 (SC), p.SC1096
Main Authors: Li, Zixuan, Lee, Sangyeop, Ishihara, Noboru, Ito, Hiroyuki
Format: Article
Language:English
Subjects:
Capacitance
capacitive sensor
Capacitors
Circuits
CMOS
Electric potential
Feedback
High resolution
Inverters
low power
noise reduction
Oscillators
Power consumption
RC Oscillator
Resistors
Voltage
voltage integration feedback
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Summary:In this paper, new circuit techniques are proposed and applied for low-power, high-resolution capacitance sensing. The first is a CMOS inverter-based resistor-capacitor oscillator that consists of a resistor, a capacitor, and three inverters, allowing it to operate at low supply voltage and low power with a wide sensing range. The second is a voltage-integration feedback (VIF), which suppresses low-frequency jitter noise generated by internal and external noise. As a result, a fabricated circuit with a 0.18 μ m CMOS process technology exhibits the sensitivity of 10.5 μ s pF −1 with 2.12 ppm resolution in the oscillation frequency, in addition to 7.52 μ W power consumption under a 1 V power supply.
ISSN:0021-4922
1347-4065
DOI:10.35848/1347-4065/acbd58