Simulation of channeled implantation of magnesium ions in gallium nitride

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Bibliographic Details
Published in:Applied physics express 2021-11, Vol.14 (11), p.116502
Main Authors: Nishimura, Tomoaki, Kachi, Tetsu
Format: Article
Language:English
Subjects:
channeling
GaN
implantation
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ISSN:1882-0778
1882-0786
DOI:10.35848/1882-0786/ac2a55