Properties of Titanium Oxynitride Prepared by RF Plasma

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Bibliographic Details
Published in:Advances in chemical engineering and science 2015, Vol.5 (1), p.1-14
Main Authors: El-Hossary, Fayez M., Negm, Niemat Z., Abd El-Rahman, Ahmed M., Raaif, Mohamed, Abd Elmula, Alzahraa A.
Format: Article
Language:English
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ISSN:2160-0392
2160-0406
DOI:10.4236/aces.2015.51001