Features of the formation and nanostructure of the film with the basic hexagonal phase TiN 0.3 by arc evaporation

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Bibliographic Details
Published in:Journal of biophysical chemistry 2011, Vol.2 (1), p.26-31
Main Authors: Kameneva, Anna L., Guselnikova, L'ybov N., Soshina, Tatyana O.
Format: Article
Language:English
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ISSN:2153-036X
2153-0378
DOI:10.4236/jbpc.2011.21004