Development of Low Dark Current SiGe Near-Infrared PIN Photodetectors on 300 mm Silicon Wafers

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Bibliographic Details
Published in:Optics and photonics journal 2016, Vol.6 (5), p.61-68
Main Authors: Rouse, Caitlin, Zeller, John W., Efstathiadis, Harry, Haldar, Pradeep, Lewis, Jay S., Dhar, Nibir K., Wijewarnasuriya, Priyalal, Puri, Yash R., Sood, Ashok K.
Format: Article
Language:English
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ISSN:2160-8881
2160-889X
DOI:10.4236/opj.2016.65009