Transfer printing of Al 2 O 3 gate dielectric for fabrication of top-gate MoS 2 FET

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Bibliographic Details
Published in:Applied physics express 2019-02, Vol.12 (2), p.26501
Main Authors: Kawanago, Takamasa, Oba, Tomoaki, Oda, Shunri
Format: Article
Language:English
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ISSN:1882-0778
1882-0786
DOI:10.7567/1882-0786/aaf995