Scanning probe memory with patterned amorphous carbon layer

The write and readout performances of a novel patterned probe memory using amorphous carbon film is investigated by a newly developed electrical switching model based on the modified Poole-Frenkel mechanism. According to this model, the optimized media stack consists of a 40 nm titanium nitride unde...

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Bibliographic Details
Published in:Applied physics express 2019-07, Vol.12 (7), p.75012
Main Authors: Wang, Lei, Liu, Zhi-Gao, Yang, Ci-Hui, Wen, Jing, Xiong, Bang-Shu
Format: Article
Language:English
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Summary:The write and readout performances of a novel patterned probe memory using amorphous carbon film is investigated by a newly developed electrical switching model based on the modified Poole-Frenkel mechanism. According to this model, the optimized media stack consists of a 40 nm titanium nitride underlayer and amorphous carbon cells with the dimension of 5 × 5 × 5 nm3, isolated by a silicon dioxide region with a width of 3 nm. The capability of the designed device to provide ultra-high density, utmost reading contrast, ultra-low energy consumption and superb anti-thermal/readout interference was demonstrated, thus making it superior to any reported probe memories to date.
ISSN:1882-0778
1882-0786
DOI:10.7567/1882-0786/ab28a4