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Impact of 3D growth and SiN x interlayer on the quality of (11–22) semi-polar GaN grown on m -plane sapphire
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Published in: | Applied physics express 2019-11, Vol.12 (11), p.115501 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | |
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ISSN: | 1882-0778 1882-0786 |
DOI: | 10.7567/1882-0786/ab47b7 |