A self-calibration method with high-accuracy and low-cost for large-area motion stage based on digital grating projection mode

We report a self-calibration method with high-accuracy and low-cost for large-area motion stage. A programmable digital grating projection mode based on digital micromirror device was proposed, which can effectively avoid defocusing problem of calibration system and complete a stable high-accuracy c...

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Bibliographic Details
Published in:Applied physics express 2019-12, Vol.12 (12), p.126503
Main Authors: Huang, Shengzhou, Li, Mujun, Wang, Lei, Su, Yongsheng, Liang, Yi
Format: Article
Language:English
Subjects:
digital grating projection mode
digital micromirror device (DMD)
least square method
positional accuracy
reverse strategy
self-calibration
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Summary:We report a self-calibration method with high-accuracy and low-cost for large-area motion stage. A programmable digital grating projection mode based on digital micromirror device was proposed, which can effectively avoid defocusing problem of calibration system and complete a stable high-accuracy calibration. Instead of adopting the high-cost laser interferometer measurement system, a self-calibration method based on reverse strategy was developed, which can easily obtain an optimal positional accuracy. This presented method can be expected to provide a new route for developing various applications such as laser direct writing equipment, automated optical inspection equipment.
ISSN:1882-0778
1882-0786
DOI:10.7567/1882-0786/ab4f58