Ultralow contact resistivity in annealed titanium edge contacts for multilayered graphene

The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end...

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Bibliographic Details
Published in:Applied physics express 2015-02, Vol.8 (2), p.25101
Main Authors: Ito, Kazuyuki, Ogata, Takamasa, Sakai, Tadashi, Awano, Yuji
Format: Article
Language:English
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Summary:The structure dependence and electrical properties of a metal contact with multilayered graphene (MLG) have been investigated. We demonstrate the superiority of end- (or edge-) contact configurations for future three-dimensional (3D) interconnect applications. The contact resistivity of titanium end contacts can be lowered to 7.7 × 10−8 Ω cm2 by thermal annealing at 450 °C, which is 2 orders of magnitude lower than that of conventional top-contact configurations, and to the best of our knowledge, it is the lowest value ever reported for a pristine MLG. X-ray photoelectron spectroscopy (XPS) measurements revealed the formation of covalent-bonded titanium carbide as an interface layer between the metal layer and MLG.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.8.025101