Fabrication of freestanding heteroepitaxial diamond substrate via micropatterns and microneedles

The fabrication of a high-quality freestanding diamond substrate was successfully demonstrated via heteroepitaxy by introducing diamond micropatterns and microneedles in the early stage of growth. Micropatterns contributed to a marked reduction in the number of dislocations induced by epitaxial late...

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Bibliographic Details
Published in:Applied physics express 2016-03, Vol.9 (3), p.35504
Main Authors: Aida, Hideo, Kim, Seong-Woo, Ikejiri, Kenjiro, Kawamata, Yuki, Koyama, Koji, Kodama, Hideyuki, Sawabe, Atsuhito
Format: Article
Language:English
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Summary:The fabrication of a high-quality freestanding diamond substrate was successfully demonstrated via heteroepitaxy by introducing diamond micropatterns and microneedles in the early stage of growth. Micropatterns contributed to a marked reduction in the number of dislocations induced by epitaxial lateral overgrowth, and microneedles relaxed heteroepitaxial strain. Raman spectroscopy indicated the absence of nondiamond carbon inclusions in the obtained freestanding substrate. The full width at half maximum of the X-ray rocking curve for diamond (004) reflections was 0.07°, the lowest value for heteroepitaxial diamond that has been reported so far. The results provide novel insights toward realizing large-diameter single-crystalline diamond substrates.
ISSN:1882-0778
1882-0786
DOI:10.7567/APEX.9.035504