A New Cold Sputtering System Using a Trapping Electrode

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 1974-01, Vol.13 (S1), p.253
Main Authors: Aoshima, Shoichi, Asamaki, Tatsuo
Format: Article
Language:English
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAPS.2S1.253