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Epitaxial Deposition of Niobium Nitride by Sputtering

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Bibliographic Details
Published in:	Japanese Journal of Applied Physics 1974-01, Vol.13 (S1), p.613
Main Authors:	Kosaka, Shin, Onodera, Yutaka
Format:	Article
Language:	English
Citations:	Items that cite this one
Online Access:	Get full text
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