Nonconfocal Differential Interferometry Sensing Scheme for Scanning Probe Microscopy

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-04, Vol.50 (4R), p.48002
Main Authors: Lin, Yu-Cheng, Cheng, Stone
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.048002