Advanced Organic Polymer for the Aggressive Scaling of Low- k Materials

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-04, Vol.50 (4S), p.4
Main Authors: Pantouvaki, Marianna, Huffman, Craig, Zhao, Larry, Heylen, Nancy, Ono, Yukiharu, Nakajima, Michio, Nakatani, Koji, Beyer, Gerald P., Baklanov, Mikhail R.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.04DB01