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Reduced Contact Resistance and Improved Surface Morphology of Ohmic Contacts on GaN Employing KrF Laser Irradiation

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-04, Vol.50 (4S), p.4
Main Authors: Wang, Grace Huiqi, Wong, Ting-Chong, Wang, Xin-cai, Zheng, Hong-Yu, Chan, Taw-Kuei, Osipowicz, Thomas, Foo, Yong-Lim, Tripathy, Sudhiranjan
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.04DF06