Growth of IrO x –SnO x Films Deposited by Reactive Sputtering

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-05, Vol.50 (5S2), p.5
Main Authors: Harada, Shun, Yoshino, Kenji, Fukudome, Syuji, Kawano, Yoshihiko, Sei, Fumihiro
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.05FB14