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Using FlexRay in Computational Lithography

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Bibliographic Details
Published in:	Japanese Journal of Applied Physics 2011-06, Vol.50 (6S), p.6
Main Authors:	Socha, Robert, Shao, Wenjin, Dommelen, Youri van, Oorschot, Dorothe, Meggens, Henry, Vellanki, Venu, Adrichem, Paul van, Xie, Xu, Gau, Justin, Aldana, Rafael, Du, Fei, Goossens, Ronald, Yu, Zongchang, Reijnen, Liesbeth, Knops, Roel, Schreel, Koen, Hsu, Stephen, Chen, Luoqi, Gronlund, Keith
Format:	Article
Language:	English
Citations:	Items that this one cites
Online Access:	Get full text
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