Thermal Stability of Pd Gate in Pseudomorphic InGaAs Heterostructures

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-06, Vol.50 (6S), p.6, Article 06GF19
Main Authors: Ishikura, Tomotsugu, Cui, Zhixin, Matsuda, Takashi, Yoh, Kanji
Format: Article
Language:eng ; jpn
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ISSN:1347-4065
0021-4922
1347-4065
DOI:10.7567/JJAP.50.06GF19