Effects of Deposition Time Duration on Thermal Diffusivity of Hydrogenated Amorphous Carbon Films

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2011-12, Vol.50 (12R), p.125602
Main Authors: Kim, Yun Young, Alwi, Hasan Adli, Awang, Rozidawati, Krishnaswamy, Sridhar
Format: Article
Language:English
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.50.125602