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Radio Frequency Plasma Transition Caused by Gas Puffing and/or Direct Current Biasing Using Multiturn Internal Antenna

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Bibliographic Details
Published in:	Japanese Journal of Applied Physics 2012-01, Vol.51 (1S), p.1
Main Authors:	Yamauchi, Toshihiko, Kobayashi, Seiji, Sugibayashi, Hideyuki, Tachibana, Toshiyuki, Naitoh, Shunya, Kanno, Yoshinori, Hiruta, Toshihito
Format:	Article
Language:	eng ; jpn
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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