Damage Analysis of Plasma-Etched n-GaN Crystal Surface by Nitrogen K Near-Edge X-ray Absorption Fine Structure Spectroscopy

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2012-01, Vol.51 (1S), p.1
Main Authors: Niibe, Masahito, Kotaka, Takuya, Kawakami, Retsuo, Inaoka, Takeshi, Tominaga, Kikuo, Mukai, Takashi
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.51.01AB02