Effects of Specimen Dimensions on Adhesive Shear Strength between a Microsized SU-8 Column and a Silicon Substrate

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2012-06, Vol.51 (6S), p.6
Main Authors: Ishiyama, Chiemi, Tasaki, Toshikazu, Chan, Tso-Fu Mark, Sone, Masato
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.51.06FL19