Layer-to-Layer Grating Coupler Based on Hydrogenated Amorphous Silicon for Three-Dimensional Optical Circuits

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 2012-12, Vol.51 (12R), p.120203
Main Authors: Kang, Joonhyun, Atsumi, Yuki, Oda, Manabu, Amemiya, Tomohiro, Nishiyama, Nobuhiko, Arai, Shigehisa
Format: Article
Language:eng ; jpn
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ISSN:0021-4922
1347-4065
DOI:10.7567/JJAP.51.120203